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NanoVIBE™ and VibriScan™ are non-contact position and
motion sensors for ultra-precision engineering facilities. These sensors achieve nanometer-to-picometer
resolution over millimeter ranges in time resolved positional
measurements at high data rates. They
are highly effective in measurements to most reflective materials (metal
surfaces, polished semiconductor wafers, and dielectrics (plastics, optics,
etc.)) with no restriction to target geometry (planar, cylindrical,
spherical, or a point-by-point measurement to an arbitrary shape).
The
NanoVIBE™ system
consists of a remote motion (and temperature) sensing module, an integrated
electro-optic and electronic control unit with a PC interface and multi-channel
expansion capability, and a Windows-based data acquisition workstation
with a software operating system. It is
designed for plug-and-play compatibility with industrial equipment
VibriScan™ features
an integrated sensor with calibration facility, analog signal output, and a
digital readout in a convenient palm size module. This
sensor is designed for PC-based data acquisition systems for sensing motion
parameters at several points in a machine tool, polishing, or fabrication
system.
NanoVIBE™ and VibriScan™ are ideal
for the following applications:
The NanoVIBE sensor
system features:
A pdf brochure with complete information on NanoVIBE models, software,
operational details, and accessories is available here.
Please contact us for additional assistance with a specific application.
The VibriScan™ Micro▼™, Nano▼™, Pico▼™ , and Micro Σ™, Nano Σ™ , and
Micro ∂™, Nano ∂™ are fully integrated small handheld
modules with our latest motion-sensing technology, capable of picometer
resolution over a maximum range of ± 250 μm. VibriScan is ideal for its simple set up and measurement of a
full set of motion parameters in the ultra-precision machine tool and the
polishing environments. VibriScan™ features:
VibriScan™ features
a miniature integrated laser probe, sensing electronics, calibration facility,
analog signal output compatible with high-speed data-acquisition systems, and a
digital readout in a convenient palm size module. The
frequency, amplitude, and phase of the vibratory motion of the target are
resolved in a measurement. The sensor
operates without physical contact and the measurement procedure is
non-invasive.
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