Position / Motion Sensing Products

  NanoVIBE Sensor Systems
  Machine Tool Measurements
  NanoVIBE Systems (pdf)

  VibriScan Nanometer Sensor Modules

 DEMO Systems Available for Sale 

  Nano InSPEC Metrology Systems

 Ultrafast Sensors Photonics Products

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NanoVIBE™ and VibriScan™ are non-contact position and motion sensors for ultra-precision engineering facilities.  These sensors achieve nanometer-to-picometer resolution over millimeter ranges in time resolved positional measurements at high data rates.  They are highly effective in measurements to most reflective materials (metal surfaces, polished semiconductor wafers, and dielectrics (plastics, optics, etc.)) with no restriction to target geometry (planar, cylindrical, spherical, or a point-by-point measurement to an arbitrary shape). 

The NanoVIBE™ system consists of a remote motion (and temperature) sensing module, an integrated electro-optic and electronic control unit with a PC interface and multi-channel expansion capability, and a Windows-based data acquisition workstation with a software operating system.  It is designed for plug-and-play compatibility with industrial equipment

VibriScan™ features an integrated sensor with calibration facility, analog signal output, and a digital readout in a convenient palm size module.  This sensor is designed for PC-based data acquisition systems for sensing motion parameters at several points in a machine tool, polishing, or fabrication system.

NanoVIBE™ and VibriScan™ are ideal for the following applications:


The  NanoVIBE sensor system  features:

A pdf brochure with complete information on NanoVIBE models, software, operational details, and accessories is available here.  Please contact us for additional assistance with a specific application.


The  VibriScan  Micro,  Nano, Pico  , and  Micro Σ, Nano Σ  , and  Micro , Nano are fully integrated small handheld modules with our latest motion-sensing technology, capable of picometer resolution over a maximum range of ± 250 μm.  VibriScan is ideal for its simple set up and measurement of a full set of motion parameters in the ultra-precision machine tool and the polishing environments.  VibriScan™ features:

VibriScan™ features a miniature integrated laser probe, sensing electronics, calibration facility, analog signal output compatible with high-speed data-acquisition systems, and a digital readout in a convenient palm size module.  The frequency, amplitude, and phase of the vibratory motion of the target are resolved in a measurement.  The sensor operates without physical contact and the measurement procedure is non-invasive.


 

 

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